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Records with Keyword: Fault Detection
Showing records 101 to 125 of 137. [First] Page: 1 2 3 4 5 6 Last
Empirical Wavelet Transform-Based Intelligent Protection Scheme for Microgrids
Syed Basit Ali Bukhari, Abdul Wadood, Tahir Khurshaid, Khawaja Khalid Mehmood, Sang Bong Rhee, Ki-Chai Kim
February 24, 2023 (v1)
Keywords: empirical wavelet transform, fault classification, Fault Detection, long short-term memory network, microgrid protection
Recently, the concept of the microgrid (MG) has been developed to assist the penetration of large numbers of distributed energy resources (DERs) into distribution networks. However, the integration of DERs in the form of MGs disturbs the operating codes of traditional distribution networks. Consequently, traditional protection strategies cannot be applied to MG against short-circuit faults. This paper presents a novel intelligent protection strategy (NIPS) for MGs based on empirical wavelet transform (EWT) and long short-term memory (LSTM) networks. In the proposed NIPS, firstly, the three-phase current signals measured by protective relays are decomposed into empirical modes (EMs). Then, various statistical features are extracted from the obtained EMs. Afterwards, the extracted features along with the three-phase current measurement are input to three different LSTM network to obtain exact fault type, phase, and location information. Finally, a trip signal based on the obtained fault... [more]
Improved Semi-Supervised Data-Mining-Based Schemes for Fault Detection in a Grid-Connected Photovoltaic System
Benamar Bouyeddou, Fouzi Harrou, Bilal Taghezouit, Ying Sun, Amar Hadj Arab
February 24, 2023 (v1)
Keywords: data-driven methods, dimensionality reduction, Fault Detection, PCR, photovoltaic systems, PLS, sensor faults, TEWMA
Fault detection is a necessary component to perform ongoing monitoring of photovoltaic plants and helps in their safety, maintainability, and productivity with the desired performance. In this study, an innovative technique is introduced by amalgamating Latent Variable Regression (LVR) methods, namely Principal Component Regression (PCR) and Partial Least Square (PLS), and the Triple Exponentially Weighted Moving Average (TEWMA) statistical monitoring scheme. The TEWMA scheme is known for its sensitivity to uncovering changes of small magnitude. Nevertheless, TEWMA can only be utilized for monitoring single variables and ignoring the correlation among monitored variables. To alleviate this difficulty, the LVR methods (i.e., PCR and PLS) are used as residual generators. Then, the TEWMA is applied to the obtained residuals for fault detection purposes, where the detection threshold is computed via kernel density estimation to improve its performance and widen its applicability in practic... [more]
A State-Observer-Based Protection Scheme for AC Microgrids with Recurrent Neural Network Assistance
Faisal Mumtaz, Haseeb Hassan Khan, Amad Zafar, Muhammad Umair Ali, Kashif Imran
February 24, 2023 (v1)
Keywords: Artificial Intelligence, Fault Detection, fault localization, high impedance faults, particle filter, recurrent neural network
The microgrids operate in tie-up (TU) mode with the main grid normally, and operate in isolation (IN) mode without the main grid during faults. In a dynamic operational regime, protecting the microgrids is highly challenging. This article proposes a new microgrid protection scheme based on a state observer (SO) aided by a recurrent neural network (RNN). Initially, the particle filter (PF) serves as a SO to estimate the measured current/voltage signals from the corresponding bus. Then, a natural log of the difference between the estimated and measured current signal is taken to estimate the per-phase particle filter deviation (PFD). If the PFD of any single phase exceeds the preset threshold limit, the proposed scheme successfully detects and classifies the faults. Finally, the RNN is implemented on the SO-estimated voltage and current signals to retrieve the non-fundamental harmonic features, which are then utilized to compute RNN-based state observation energy (SOE). The directional a... [more]
High-Precision Fault Detection for Electric Vehicle Battery System Based on Bayesian Optimization SVDD
Jiong Yang, Fanyong Cheng, Maxwell Duodu, Miao Li, Chao Han
February 24, 2023 (v1)
Keywords: battery system, data-driven, electric vehicle, Fault Detection
Fault detection of the electric vehicle battery system is vital for safe driving, energy economy, and lifetime extension. This paper proposes a data-driven method to achieve early and accurate battery system fault detection to realize rapid early warning. The method first adopts the support vector data description model mapping the feature of unlabeled voltage and temperature into a minimum volume hypersphere in high-dimensional space. When the feature is located outside the hypersphere, it is judged to be faulty. Then, to overcome the problem of hyperparameters selection, Bayesian optimization and a small amount of label data are used to iteratively train the model. This step can greatly improve the fault detection ability of the model, which is conducive to mining early and minor faults. Finally, the proposed model is compared with three unsupervised fault detection models, principal component analysis, kernel principal component analysis, and support vector data description to valid... [more]
Interturn Short Fault Detection and Location of Permanent Magnet Wind Generator Based on Negative Sequence Current Residuals
Tonghua Wu, Shouguo Cai, Wei Dai, Ying Zhu, Xiaobao Liu, Xindong Li
February 24, 2023 (v1)
Keywords: current residuals, Fault Detection, fault phase location, interturn short fault, negative sequence, permanent magnet synchronous generator
This article proposes a model-based method for the detection and phase location of interturn short fault (ISF) in the permanent magnet synchronous generator (PMSG). The simplified mathematical model of PMSG with ISF on dq-axis is established to analyze the fault signature. The current residuals are accurately estimated through Luenberger observer based on the expanded mathematical model of PMSG. In current residuals, the second harmonics are extracted using negative sequence park transform and angular integral filtering to construct the fault detection index. In addition, the unbalance characteristics of three-phase current after ISF can reflect the location of the fault phase, based on which the location indexes are defined. Simulation results for various operating and fault severity conditions primarily validate the effectiveness and robustness of diagnosis method in this paper.
Machine Learning Based Protection Scheme for Low Voltage AC Microgrids
Muhammad Uzair, Mohsen Eskandari, Li Li, Jianguo Zhu
February 24, 2023 (v1)
Keywords: AC microgrid protection, Fault Detection, fault type classification, faulted phase identification, feature extraction, Machine Learning, max factor, peaks metric
The microgrid (MG) is a popular concept to handle the high penetration of distributed energy resources, such as renewable and energy storage systems, into electric grids. However, the integration of inverter-interfaced distributed generation units (IIDGs) imposes control and protection challenges. Fault identification, classification and isolation are major concerns with IIDGs-based active MGs where IIDGs reveal arbitrary impedance and thus different fault characteristics. Moreover, bidirectional complex power flow creates extra difficulties for fault analysis. This makes the conventional methods inefficient, and a new paradigm in protection schemes is needed for IIDGs-dominated MGs. In this paper, a machine-learning (ML)-based protection technique is developed for IIDG-based AC MGs by extracting unique and novel features for detecting and classifying symmetrical and unsymmetrical faults. Different signals, namely, 400 samples, for wide variations in operating conditions of an MG are o... [more]
Representation Learning for Detecting the Faults in a Wind Turbine Hydraulic Pitch System Using Deep Learning
Panagiotis Korkos, Jaakko Kleemola, Matti Linjama, Arto Lehtovaara
February 24, 2023 (v1)
Keywords: deep autoencoder, Fault Detection, feature extraction, pitch system, SCADA, wind turbine
Wind turbine operators usually use data from a Supervisory Control and Data Acquisition system to monitor their conditions, but it is challenging to make decisions about maintenance based on hundreds of different parameters. Information is often hidden within measurements that operators are unaware of. Therefore, different feature extraction techniques are recommended. The pitch system is of particular importance, and operators are highly motivated to search for effective monitoring solutions. This study investigated different dimensionality reduction techniques for monitoring a hydraulic pitch system in wind turbines. These techniques include principal component analysis (PCA), kernel PCA and a deep autoencoder. Their effectiveness was evaluated based on the performance of a support vector machine classifier whose input space is the new extracted feature set. The developed methodology has been applied to data from a wind farm consisting of five 2.3 MW fixed-speed onshore wind turbines... [more]
Predictive Process Adjustment by Detecting System Status of Vacuum Gripper in Real Time during Pick-Up Operations
Sujeong Baek, Dong Oh Kim
February 23, 2023 (v1)
Keywords: Fault Detection, predictive process adjustment, real-time monitoring, sensor data, vacuum gripper
In manufacturing systems, pick-up operations by vacuum grippers may fail owing to manufacturing errors in an object’s surface that are within the allowable tolerance limits. In such situations, manual interference is required to resume system operation, which results in considerable loss of time as well as economic losses. Although vacuum grippers have many advantages and are widely used in the industry, it is highly difficult to directly monitor the current machine status and provide appropriate recovery feedback for stable operation. Therefore, this paper proposes a method to detect the success or failure of a suction operation in advance by analyzing the amount of outlet air pressure in the Venturi line. This was achieved by installing an air pressure sensor on the Venturi line to predict whether the current suction action will be successful. Through empirical experiments, it was found that downward movements in the z-axis of the vacuum gripper can easily rectify a faulty gripper su... [more]
Decentralized Fault Detection and Fault-Tolerant Control for Nonlinear Interconnected Systems
Shun Zhou, Jianjun Bai, Feng Wu
February 23, 2023 (v1)
Keywords: communication protocol, decentralized, Fault Detection, fault-tolerant control, interconnection influence
The nonlinear interconnected system is a complex and important system in daily production and life in general. Due to the interconnection influence between subsystems and external disturbance factors, the system is prone to failure. For this kind of system, a decentralized fault detection and fault tolerant control method is proposed here. Compared with the traditional control scheme, this paper designs a subsystem communication protocol to reduce the information exchange between subsystems. Based on this communication protocol, a fault detection scheme is then designed. Due to the existence of a fault detection threshold in this scheme, the system can detect the fault in time without missing it or having a false alarm. Under the assumed condition, the adaptive control rate is obtained by establishing the adaptive approximation model to approximate the upper bound of the fault, and the subsystem adaptively adjusts the control rate according to the fault condition, so that the system ca... [more]
Evaluation of One-Class Classifiers for Fault Detection: Mahalanobis Classifiers and the Mahalanobis−Taguchi System
Seul-Gi Kim, Donghyun Park, Jae-Yoon Jung
February 23, 2023 (v1)
Keywords: Fault Detection, imbalanced classification, Mahalanobis distance, Mahalanobis–Taguchi system, one-class classification, smart manufacturing
Today, real-time fault detection and predictive maintenance based on sensor data are actively introduced in various areas such as manufacturing, aircraft, and power system monitoring. Many faults in motors or rotating machinery like industrial robots, aircraft engines, and wind turbines can be diagnosed by analyzing signal data such as vibration and noise. In this study, to detect failures based on vibration data, preprocessing was performed using signal processing techniques such as the Hamming window and the cepstrum transform. After that, 10 statistical condition indicators were extracted to train the machine learning models. Specifically, two types of Mahalanobis distance (MD)-based one-class classification methods, the MD classifier and the Mahalanobis−Taguchi system, were evaluated in detecting the faults of rotating machinery. Their performance for fault detection on rotating machinery was evaluated with different imbalanced ratios of data by comparing with binary classification... [more]
Data Driven Detection of Different Dissolved Oxygen Sensor Faults for Improving Operation of the WWTP Control System
Alexandra-Veronica Luca, Melinda Simon-Várhelyi, Norbert-Botond Mihály, Vasile-Mircea Cristea
February 23, 2023 (v1)
Keywords: automatic controlled wastewater treatment plant, DO concentration sensors, Fault Detection, principal component analysis
Sensor faults frequently occur in wastewater treatment plant (WWTP) operation, leading to incomplete monitoring or poor control of the plant. Reliable operation of the WWTP considerably depends on the aeration control system, which is essentially assisted by the dissolved oxygen (DO) sensor. Results on the detection of different DO sensor faults, such as bias, drift, wrong gain, loss of accuracy, fixed value, or complete failure, were investigated based on Principal Components Analysis (PCA). The PCA was considered together with two statistical approaches, i.e., the Hotelling’s T2 and the Squared Prediction Error (SPE). Data used in the study were generated using the previously calibrated first-principle Activated Sludge Model no.1 for the Anaerobic-Anoxic-Oxic (A2O) reactors configuration. The equation-based model was complemented with control loops for DO concentration control in the aerobic reactor and nitrates concentration control in the anoxic reactor. The PCA data-driven model w... [more]
Photovoltaic Module Fault Detection Based on a Convolutional Neural Network
Shiue-Der Lu, Meng-Hui Wang, Shao-En Wei, Hwa-Dong Liu, Chia-Chun Wu
February 23, 2023 (v1)
Keywords: chaos synchronization detection method, convolutional neural networks, extension neural network, Fault Detection, PV module
With the rapid development of solar energy, the photovoltaic (PV) module fault detection plays an important role in knowing how to enhance the reliability of the solar photovoltaic system and knowing the fault type when a system problem occurs. Therefore, this paper proposed the hybrid algorithm of chaos synchronization detection method (CSDM) with convolutional neural network (CNN) for studying PV module fault detection. Four common PV module states were discussed, including the normal PV module, module breakage, module contact defectiveness and module bypass diode failure. First of all, the defects in 16 pieces of 20W monocrystalline silicon PV modules were preprocessed, and there were four pieces of each fault state. When the signal generator delivered high frequency voltage to the PV module, the original signal was measured and captured by the NI PXI-5105 high-speed data acquisition system (DAS) and was calculated by CSDM, to establish the chaos dynamic error map as the image featu... [more]
Robust Detection of Minute Faults in Uncertain Systems Using Energy Activity
Manarshhjot Singh, Anne-Lise Gehin, Belkacem Ould-Boaumama
February 23, 2023 (v1)
Keywords: bond graph, energy activity, Fault Detection
Fault detection is one of the key steps in Fault Detection and Isolation (FDI) and, therefore, critical for subsequent prognosis or implementation of Fault Tolerant Control (FTC). It is, therefore, advisable to utilize detection algorithms which are quick and can detect the smallest faults. Model-based detection methods satisfy both these criteria and should be preferred. However, a big limitation for model-based methods is that they require the accurate value of the component parameters, which is difficult to obtain in real situations. This limits the accuracy of model-based methods. This paper proposes a new method for fault detection using Energy Activity (EA) which can detect minute levels of fault in systems with high component uncertainty. Different forms of EA are developed for use as an FDI metric. The proposed forms are simulated using a two-tank system under various types of faults. The results are compared with each other and with the traditional model-based FDI method using... [more]
Intelligent and Data-Driven Fault Detection of Photovoltaic Plants
Siya Yao, Qi Kang, Mengchu Zhou, Abdullah Abusorrah, Yusuf Al-Turki
February 23, 2023 (v1)
Keywords: Fault Detection, performance evaluation, PV monitoring system, tree-based regression, unsupervised learning method
Most photovoltaic (PV) plants conduct operation and maintenance (O&M) by periodical inspection and cleaning. Such O&M is costly and inefficient. It fails to detect system faults in time, thus causing heavy loss. To ensure their operations are at an ideal state, this work proposes an unsupervised method for intelligent performance evaluation and data-driven fault detection, which enables engineers to check PV panels in time and implement timely maintenance. It classifies monitoring data into three subsets: ideal period A, transition period S, and downturn period B. Based on A and B datasets, we build two non-continuous regression prediction models, which are based on a tree ensemble algorithm and then modified to fit the non-continuous characteristic of PV data. We compare real-time measured power with both upper and lower reference baselines derived from two predictive models. By calculating their threshold ranges, the proposed method achieves the instantaneous performance monitoring o... [more]
T-S Fuzzy Model-Based Fault Detection for Continuous Stirring Tank Reactor
Yanqin Wang, Weijian Ren, Zhuoqun Liu, Jing Li, Duo Zhang
February 22, 2023 (v1)
Keywords: channel fading, continuous stirring reactors, Fault Detection, T-S fuzzy model
Continuous stirring tank reactors are widely used in the chemical production process, which is always accompanied by nonlinearity, time delay, and uncertainty. Considering the characteristic of the actual reaction of the continuous stirring tank reactors, the fault detection problem is studied in terms of the T-S fuzzy model. Through a fault detection filter performance analysis, the sufficient condition for the filtering error dynamics is obtained, which meets the exponential stability in the mean square sense and the given performance requirements. The design of the fault detection filter is transformed into one that settles the convex optimization issue of linear matrix inequality. Numerical analysis shows the effectiveness of this scheme.
Fault Detection Method Based on Global-Local Marginal Discriminant Preserving Projection for Chemical Process
Yang Li, Fangyuan Ma, Cheng Ji, Jingde Wang, Wei Sun
February 22, 2023 (v1)
Keywords: discriminative feature extraction, Fault Detection, global local preserving projection, multiple marginal fisher analysis
Feature extraction plays a key role in fault detection methods. Most existing methods focus on comprehensive and accurate feature extraction of normal operation data to achieve better detection performance. However, discriminative features based on historical fault data are usually ignored. Aiming at this point, a global-local marginal discriminant preserving projection (GLMDPP) method is proposed for feature extraction. Considering its comprehensive consideration of global and local features, global-local preserving projection (GLPP) is used to extract the inherent feature of the data. Then, multiple marginal fisher analysis (MMFA) is introduced to extract the discriminative feature, which can better separate normal data from fault data. On the basis of fisher framework, GLPP and MMFA are integrated to extract inherent and discriminative features of the data simultaneously. Furthermore, fault detection methods based on GLMDPP are constructed and applied to the Tennessee Eastman (TE) p... [more]
A Real-Time Configuration Approach for an Observer-Based Residual Generator of Fault Detection Systems
Hao Zhao, Hao Luo, Tianyu Liu
February 21, 2023 (v1)
Keywords: Fault Detection, gradient optimization, observer-based residual generator, real-time configuration
This paper is concerned with the real-time configuration of fault detection systems by exploiting an gradient optimization scheme. It is known that industrial processes may often encounter some uncertainties or changes of operating points and environment, which would lead to an unsatisfactory fault detection result. To handle this problem, a real-time (or online) configuration strategy is introduced, which plays an important role in ensuring the efficiency of the fault detection method without a high industrial cost. In this paper, a gradient-based iterative optimization scheme is taken into account for the real-time configuration implementation. By utilizing the gradient-based iterative algorithm to minimize the K-gap between the residual generator and the current system, the parameters of the residual generator can be configured from the online input/output data. Based on this, real-time configuration of the residual generator parameters is achieved and, correspondingly, the fault de... [more]
Modeling and Monitoring for Laminar Cooling Process of Hot Steel Strip Rolling with Time−Space Nature
Qiang Wang, Kaixiang Peng, Jie Dong
February 21, 2023 (v1)
Keywords: distributed parameter systems, Fault Detection, hot steel strip rolling, laminar cooling process, process monitoring, time–space separation
The laminar cooling process is an important procedure in hot steel strip rolling. The spatial distribution and the drop curve of the strip temperature are crucial for the production and the quality of the steel strip. Traditionally, lumped parameter methods are often used for the modeling of the laminar cooling process, making it difficult to consider the impact of the variation of state variables and related parameters on the system, which seriously affect the stability of the steel strip quality. In this paper, a modeling and monitoring method with a time−space nature for the laminar cooling process is proposed to monitor the spatial variation of the strip temperature. Firstly, the finite-dimensional model is obtained by time−space separation to describe the temperature variation of the steel strip. Next, a global model is constructed by using the multi-modeling integration method. Then, a residual generator is designed to monitor the strip temperature where the statistics and the th... [more]
A Novel Fault Detection Scheme Based on Mutual k-Nearest Neighbor Method: Application on the Industrial Processes with Outliers
Jian Wang, Zhe Zhou, Zuxin Li, Shuxin Du
February 21, 2023 (v1)
Keywords: Fault Detection, k-nearest neighbor, mutual nearest neighbor, outliers, process monitoring, pseudo-neighbors
The k-nearest neighbor (kNN) method only uses samples’ paired distance to perform fault detection. It can overcome the nonlinearity, multimodality, and non-Gaussianity of process data. However, the nearest neighbors found by kNN on a data set containing a lot of outliers or noises may not be actual or trustworthy neighbors but a kind of pseudo neighbor, which will degrade process monitoring performance. This paper presents a new fault detection scheme using the mutual k-nearest neighbor (MkNN) method to solve this problem. The primary characteristic of our approach is that the calculation of the distance statistics for process monitoring uses MkNN rule instead of kNN. The advantage of the proposed approach is that the influence of outliers in the training data is eliminated, and the fault samples without MkNNs can be directly detected, which improves the performance of fault detection. In addition, the mutual protection phenomenon of outliers is explored. The numerical examples and Ten... [more]
Nonlinear Dynamic Process Monitoring Based on Two-Step Dynamic Local Kernel Principal Component Analysis
Hairong Fang, Wenhua Tao, Shan Lu, Zhijiang Lou, Yonghui Wang, Yuanfei Xue
February 21, 2023 (v1)
Keywords: Fault Detection, kernel principal component analysis, nonlinear dynamic process, two-step dynamic local kernel principal component analysis
Nonlinearity may cause a model deviation problem, and hence, it is a challenging problem for process monitoring. To handle this issue, local kernel principal component analysis was proposed, and it achieved a satisfactory performance in static process monitoring. For a dynamic process, the expectation value of each variable changes over time, and hence, it cannot be replaced with a constant value. As such, the local data structure in the local kernel principal component analysis is wrong, which causes the model deviation problem. In this paper, we propose a new two-step dynamic local kernel principal component analysis, which extracts the static components in the process data and then analyzes them by local kernel principal component analysis. As such, the two-step dynamic local kernel principal component analysis can handle the nonlinearity and the dynamic features simultaneously.
Characterization of Mean-Field Type H− Index for Continuous-Time Stochastic Systems with Markov Jump
Limin Ma, Caixia Song, Weihai Zhang, Zhenbin Liu
February 21, 2023 (v1)
Keywords: Fault Detection, ℋ− index, Markovian jump, mean field, stochastic systems
In this brief, we consider the mean-field type H− index problem for stochastic Markovian jump systems. A sufficient condition is derived for stochastic Markovian jump systems with (x,u)-dependent noise based on generalized differential Riccati equations. Especially for stochastic Markovian jump systems with only x-dependent noise, a sufficient and necessary condition is developed to characterize H− index larger than some ξ>0. Finally, a numerical example is addressed to verify the effectiveness of our obtained results.
Fault Detection for CNC Machine Tools Using Auto-Associative Kernel Regression Based on Empirical Mode Decomposition
Seunghwan Jung, Minseok Kim, Baekcheon Kim, Jinyong Kim, Eunkyeong Kim, Jonggeun Kim, Hyeonuk Lee, Sungshin Kim
February 21, 2023 (v1)
Keywords: auto-associative kernel regression, empirical mode decomposition, Fault Detection, machine tool
In manufacturing processes using computerized numerical control (CNC) machines, machine tools are operated repeatedly for a long period for machining hard and difficult-to-machine materials, such as stainless steel. These operating conditions frequently result in tool breakage. The failure of machine tools significantly degrades the product quality and efficiency of the target process. To solve these problems, various studies have been conducted for detecting faults in machine tools. However, the most related studies used only the univariate signal obtained from CNC machines. The fault-detection methods using univariate signals have a limitation in that multivariate models cannot be applied. This can restrict in performance improvement of the fault detection. To address this problem, we employed empirical mode decomposition to construct a multivariate dataset from the univariate signal. Subsequently, auto-associative kernel regression was used to detect faults in the machine tool. To v... [more]
A Joint Stacked Autoencoder Approach with Silhouette Information for Industrial Fault Detection
Hang Ruan, Jianbo Yu, Feng Shu, Xiaofeng Yang, Zhi Li
February 21, 2023 (v1)
Keywords: Fault Detection, joint SAE, silhouette loss, Stack Auto-Encoder (SAE)
Due to the growing complexity of industrial processes, it is no longer adequate to perform precise fault detection based solely on the global information of process data. In this study, a silhouette stacked autoencoder (SiSAE) model is constructed for process data by considering both global/local information and silhouette information to depict the link between local/cross-local. Three components comprise the SiSAE model: hierarchical clustering, silhouette loss, and the joint stacked autoencoder (SAE). Hierarchical clustering is used to partition raw data into many blocks, which clarifies the information’s characteristics. To account for silhouette information between data, a silhouette loss function is constructed by raising the inner block’s data distance and decreasing the distance of the cross-center block. Each data block has a properly sized SAE model and is jointly trained via silhouette loss to extract features from all available data. Using the Tennessee Eastman (TE) benchmar... [more]
Nonlinear Dynamic Process Monitoring Using Canonical Variate Kernel Analysis
Simin Li, Shuang-hua Yang, Yi Cao
February 17, 2023 (v1)
Keywords: CVA, Fault Detection, nonlinear dynamic process, PCA
Most industrial systems today are nonlinear and dynamic. Traditional fault detection techniques show their limits because they can hardly extract both nonlinear and dynamic features simultaneously. Canonical variate analysis (CVA) shows its excellent monitoring performance in fault detection for dynamic processes but is not applicable to nonlinear processes. Inspired by the CVA method, a novel nonlinear dynamic process monitoring method, namely, the “canonical variate kernel analysis” (CVKA), is proposed in this work. The way to extract nonlinear features is different from a traditional kernel canonical variate analysis (KCVA). In a sequential structure, the new approach firstly extracts the linear dynamic features from the data through the CVA method, followed by a kernel principal component analysis to extract nonlinear features from the CVA residual space. The new CVKA method is then applied to a TE process case study, proving the excellent performance of CVKA compared to other comm... [more]
A Review of Data Mining Applications in Semiconductor Manufacturing
Pedro Espadinha-Cruz, Radu Godina, Eduardo M. G. Rodrigues
December 6, 2022 (v1)
Keywords: data mining, Fault Detection, process control, quality control, semiconductor manufacturing, yield improvement
For decades, industrial companies have been collecting and storing high amounts of data with the aim of better controlling and managing their processes. However, this vast amount of information and hidden knowledge implicit in all of this data could be utilized more efficiently. With the help of data mining techniques unknown relationships can be systematically discovered. The production of semiconductors is a highly complex process, which entails several subprocesses that employ a diverse array of equipment. The size of the semiconductors signifies a high number of units can be produced, which require huge amounts of data in order to be able to control and improve the semiconductor manufacturing process. Therefore, in this paper a structured review is made through a sample of 137 papers of the published articles in the scientific community regarding data mining applications in semiconductor manufacturing. A detailed bibliometric analysis is also made. All data mining applications are... [more]
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