LAPSE:2023.32667
Published Article
LAPSE:2023.32667
Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer
Yonghyeon Kim, Hyeokjoo Choi, Seokhun Kwon, Seokwon Lee, Hyunil Kang, Wonseok Choi
April 20, 2023
This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with photoresist via a RF magnetron sputtering system. The RF power ratios applied to the 4 inch target of Ni and Cr were 300 W:100 W (3:1), 300 W:150 W (2:1), and 150 W:150 W (1:1). The electrical resistance of the manufactured microconstruction was calculated and measured through Hall measurements. The temperature generated by applying 1−10 V to the microconstruction electrode was observed by using an infrared camera, and was summarized using a linear equation according to the power applied to each sample.
Keywords
co-sputtering, microconstruction, nickel/chromium alloy, RF power
Suggested Citation
Kim Y, Choi H, Kwon S, Lee S, Kang H, Choi W. Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer. (2023). LAPSE:2023.32667
Author Affiliations
Kim Y: Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Korea
Choi H: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea [ORCID]
Kwon S: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea
Lee S: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea
Kang H: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea
Choi W: Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea [ORCID]
Journal Name
Energies
Volume
14
Issue
11
First Page
3217
Year
2021
Publication Date
2021-05-31
Published Version
ISSN
1996-1073
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PII: en14113217, Publication Type: Journal Article
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doi:10.3390/en14113217
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