LAPSE:2023.28935
Published Article
LAPSE:2023.28935
A New SiC Planar-Gate IGBT for Injection Enhancement Effect and Low Oxide Field
Meng Zhang, Baikui Li, Zheyang Zheng, Xi Tang, Jin Wei
April 12, 2023
A new silicon carbide (SiC) planar-gate insulated-gate bipolar transistor (IGBT) is proposed and comprehensively investigated in this paper. Compared to the traditional SiC planar-gate IGBT, the new IGBT boasts a much stronger injection enhancement effect, which leads to a low on-state voltage (VON) approaching the SiC trench-gate IGBT. The strong injection enhancement effect is obtained by a heavily doped carrier storage layer (CSL), which creates a hole barrier under the p-body to hinder minority carriers from being extracted away through the p-body. A p-shield is located at the bottom of the CSL and coupled to the p-body of the IGBT by an embedded p-MOSFET (metal-oxide-semiconductor field effect transistors). In off-state, the heavily doped CSL is shielded by the p-MOSFET clamped p-shield. Thus, a high breakdown voltage is maintained. At the same time, owing to the planar-gate structure, the proposed IGBT does not suffer the high oxide field that threatens the long-term reliability of the trench-gate IGBT. The turn-off characteristics of the new IGBT are also studied, and the turn-off energy loss (EOFF) is similar to the conventional planar-gate IGBT. Therefore, the new IGBT achieves the benefits of both the conventional planar-gate IGBT and the trench-gate IGBT, i.e., a superior VON-EOFF trade-off and a low oxide field.
Keywords
carrier storage layer, embedded trench p-MOSFET, EOFF-VON trade-off, injection enhancement effect, SiC planar-gate IGBT
Subject
Suggested Citation
Zhang M, Li B, Zheng Z, Tang X, Wei J. A New SiC Planar-Gate IGBT for Injection Enhancement Effect and Low Oxide Field. (2023). LAPSE:2023.28935
Author Affiliations
Zhang M: Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Li B: Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Zheng Z: Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Hong Kong
Tang X: Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Wei J: Institute of Microelectronics, Peking University, Beijing 100871, China
Journal Name
Energies
Volume
14
Issue
1
Article Number
E82
Year
2020
Publication Date
2020-12-25
Published Version
ISSN
1996-1073
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PII: en14010082, Publication Type: Journal Article
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LAPSE:2023.28935
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doi:10.3390/en14010082
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