Abstract
A conductive direct-write process of multilayered coils for micro electromagnetic generators is proposed. This novel approach of using silver ink to form the conductive structures largely reduces the fabrication complexity, and it provides a faster alternative to the conventional semiconductor methods. Multi-layered coils with insulation were accurately layered on a micromachined cantilevered diaphragm by a dispenser. Coils several layers thick could be used to increase the power output and double coils were separated by a layer of insulation. Six prototypes, all capable of efficient conversion of vibrational energy into electrical energy, were fabricated. The experimental results, which include measurements of the electromotive force and power output, are presented. Prototypes with two coils and thicker conducting layers had less resistance and the power output was much more than that of a single-coil unit. This generator can produce 82 nW of power at a resonance frequency of 275 Hz under 5 g excitation.