LAPSE:2023.5694
Published Article
LAPSE:2023.5694
Design and Development of Software for the SILAR Control Process Using a Low-Cost Embedded System
February 23, 2023
Abstract
Inexpensive equipment for the deposition of semiconductor thin films by SILAR was designed. Using a low-cost embedded system, a prototype controlled through a human−machine interface (HMI) was constructed. Simple, open-source software was used. The use of an HMI and programming based on state machines showed an improvement in the system control, program flow, and efficiency. The system development consists of three stages: structural design, electronics, and programming of the control and HMI. This system controls the variables of the SILAR process, such as immersion time in chemical solutions, sequence of substrates, and the number of cycles. In order to test the automated SILAR prototype, copper oxide thin films on glass substrates were processed. The copper oxide thin films have been characterized by X-ray diffraction (XRD), UV-VIS, and SEM to investigate the structural, optical, and morphological properties, respectively.
Inexpensive equipment for the deposition of semiconductor thin films by SILAR was designed. Using a low-cost embedded system, a prototype controlled through a human−machine interface (HMI) was constructed. Simple, open-source software was used. The use of an HMI and programming based on state machines showed an improvement in the system control, program flow, and efficiency. The system development consists of three stages: structural design, electronics, and programming of the control and HMI. This system controls the variables of the SILAR process, such as immersion time in chemical solutions, sequence of substrates, and the number of cycles. In order to test the automated SILAR prototype, copper oxide thin films on glass substrates were processed. The copper oxide thin films have been characterized by X-ray diffraction (XRD), UV-VIS, and SEM to investigate the structural, optical, and morphological properties, respectively.
Record ID
Keywords
automation, copper oxide (CuO), embedded systems, HMI, semiconductor thin films, SILAR
Subject
Suggested Citation
Calixto-Rodriguez M, Valdez Martínez JS, Meneses-Arcos MA, Ortega-Cruz J, Sarmiento-Bustos E, Reyes-Mayer A, González-Castañeda M, Domínguez García RO. Design and Development of Software for the SILAR Control Process Using a Low-Cost Embedded System. (2023). LAPSE:2023.5694
Author Affiliations
Calixto-Rodriguez M: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico
Valdez Martínez JS: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico [ORCID]
Meneses-Arcos MA: National Technology of Mexico/National Center for Technological Research and Development CENIDET, Department of Electronics Engineering, Interior Internado Palmira S/N, Palmira, Cuernavaca C.P. 62490, Morelos, Mexico [ORCID]
Ortega-Cruz J: Institute of Renewable Energies, National Autonomous University of Mexico, Privada Xochicalco S/N, Centro, Temixco C.P. 62580, Morelos, Mexico
Sarmiento-Bustos E: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico
Reyes-Mayer A: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico [ORCID]
González-Castañeda M: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico
Domínguez García RO: Department of Computational Sciences and Engineering, University of Guadalajara/Los Valles University Center, Guadalajara-Ameca Highway Km. 45.5, Ameca C.P. 46600, Jalisco, Mexico
Valdez Martínez JS: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico [ORCID]
Meneses-Arcos MA: National Technology of Mexico/National Center for Technological Research and Development CENIDET, Department of Electronics Engineering, Interior Internado Palmira S/N, Palmira, Cuernavaca C.P. 62490, Morelos, Mexico [ORCID]
Ortega-Cruz J: Institute of Renewable Energies, National Autonomous University of Mexico, Privada Xochicalco S/N, Centro, Temixco C.P. 62580, Morelos, Mexico
Sarmiento-Bustos E: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico
Reyes-Mayer A: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico [ORCID]
González-Castañeda M: Academic Division of Industrial Mechanics, Technological University Emiliano Zapata of the State of Morelos, Av. Universidad Tecnologica 1, Palo Escrito, Emiliano Zapata C.P. 62760, Morelos, Mexico
Domínguez García RO: Department of Computational Sciences and Engineering, University of Guadalajara/Los Valles University Center, Guadalajara-Ameca Highway Km. 45.5, Ameca C.P. 46600, Jalisco, Mexico
Journal Name
Processes
Volume
9
Issue
6
First Page
967
Year
2021
Publication Date
2021-05-29
ISSN
2227-9717
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Original Submission
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PII: pr9060967, Publication Type: Journal Article
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LAPSE:2023.5694
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https://doi.org/10.3390/pr9060967
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