LAPSE:2023.35261
Published Article
LAPSE:2023.35261
High-Thermal-Conductivity AlN Ceramics Prepared from Octyltrichlorosilane-Modified AlN Powder
Guangqi Li, Bin Li, Bo Ren, Yang Li, Haiyang Chen, Junhong Chen
April 28, 2023
Aluminum nitride has been widely used as heat-management material for large-scale integrated circuits and semiconductor packages because of its excellent insulation, high thermal conductivity, low dielectric constant and loss, similar expansion coefficient to that of silicon, and non-toxicity. However, the increase of oxygen content caused by the hydration of aluminum nitride powder during storage often decreases the thermal conductivity of aluminum nitride ceramics. In this work, we propose an approach for preparing high-thermal-conductivity AlN ceramics via octyltrichlorosilane-modified AlN powder. The octyltrichlorosilane reacted with the hydroxyl group on the surface of the AlN powder forming a siloxane protective layer. The protective layer not only enhanced the water contact angle of AlN powder from 34.8° to 151°, but also ensured the phase of AlN powder did not change in the distilled water at 25 °C for 72 h. High-thermal-conductivity AlN ceramics up to 186 W·m−1·K−1 were successfully prepared based on the modified AlN powder which had been stored for one year. This work provides a simple, effective, and practical method for the stable preparation of high-thermal-conductivity AlN ceramics.
Keywords
AlN ceramics, AlN powder, hydration resistance, octyltrichlorosilane, surface modification
Subject
Suggested Citation
Li G, Li B, Ren B, Li Y, Chen H, Chen J. High-Thermal-Conductivity AlN Ceramics Prepared from Octyltrichlorosilane-Modified AlN Powder. (2023). LAPSE:2023.35261
Author Affiliations
Li G: School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China
Li B: School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China [ORCID]
Ren B: School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China [ORCID]
Li Y: Zibo City Luzhong Refractories Co., Ltd., Zibo 255138, China
Chen H: School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China
Chen J: School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China
Journal Name
Processes
Volume
11
Issue
4
First Page
1186
Year
2023
Publication Date
2023-04-12
Published Version
ISSN
2227-9717
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PII: pr11041186, Publication Type: Journal Article
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LAPSE:2023.35261
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doi:10.3390/pr11041186
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Apr 28, 2023
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