LAPSE:2021.0067v1
Published Article
LAPSE:2021.0067v1
Optimal Cooling System Design for Increasing the Crystal Growth Rate of Single-Crystal Silicon Ingots in the Czochralski Process Using the Crystal Growth Simulation
Hye Jun Jeon, Hyeonwook Park, Ganesh Koyyada, Salh Alhammadi, Jae Hak Jung
February 22, 2021
Here, we report a successfully modified Czochralski process system by introducing the cooling system and subsequent examination of the results using crystal growth simulation analysis. Two types of cooling system models have been designed, i.e., long type and double type cooling design (LTCD and DTCD) and their production quality of monocrystalline silicon ingot was compared with that of the basic type cooling design (BTCD) system. The designed cooling system improved the uniformity of the temperature gradient in the crystal and resulted in the significant decrease of the thermal stress. Moreover, the silicon monocrystalline ingot growth rate has been enhanced to 18% by using BTCD system. The detailed simulation results have been discussed in the manuscript. The present research demonstrates that the proposed cooling system would stand as a promising technique to be applied in CZ-Si crystal growth with a large size/high pulling rate.
Keywords
cooling system design, crystal growth rate, crystal growth simulation, Czochralski process, pulling speed, single crystal silicon
Suggested Citation
Jeon HJ, Park H, Koyyada G, Alhammadi S, Jung JH. Optimal Cooling System Design for Increasing the Crystal Growth Rate of Single-Crystal Silicon Ingots in the Czochralski Process Using the Crystal Growth Simulation. (2021). LAPSE:2021.0067v1
Author Affiliations
Jeon HJ: Chemical Engineering Department, Yeungnam University, Gyeongsan 38541, Korea [ORCID]
Park H: Chemical Engineering Department, Yeungnam University, Gyeongsan 38541, Korea
Koyyada G: Chemical Engineering Department, Yeungnam University, Gyeongsan 38541, Korea
Alhammadi S: Chemical Engineering Department, Yeungnam University, Gyeongsan 38541, Korea
Jung JH: Chemical Engineering Department, Yeungnam University, Gyeongsan 38541, Korea
Journal Name
Processes
Volume
8
Issue
9
Article Number
E1077
Year
2020
Publication Date
2020-09-01
Published Version
ISSN
2227-9717
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Original Submission
Other Meta
PII: pr8091077, Publication Type: Journal Article
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LAPSE:2021.0067v1
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doi:10.3390/pr8091077
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Feb 22, 2021
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CC BY 4.0
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[v1] (Original Submission)
Feb 22, 2021
 
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Feb 22, 2021
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Calvin Tsay
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