LAPSE:2021.0691
Published Article
LAPSE:2021.0691
Characterization of a Wireless Vacuum Sensor Prototype Based on the SAW-Pirani Principle
Sofia Toto, Mazin Jouda, Jan G. Korvink, Suparna Sundarayyan, Achim Voigt, Hossein Davoodi, Juergen J. Brandner
July 29, 2021
A prototype of a wireless vacuum microsensor combining the Pirani principle and surface acoustic waves (SAW) with extended range and sensitivity was designed, modelled, manufactured and characterised under different conditions. The main components of the prototype are a sensing SAW chip, a heating coil and an interrogation antenna. All the components were assembled on a 15 mm × 11 mm × 3 mm printed circuit board (PCB). The behaviour of the PCB was characterised under ambient conditions and in vacuum. The quality of the SAW interrogation signal, the frequency shift and the received current of the coil were measured for different configurations. Pressures between 0.9 and 100,000 Pa were detected with sensitivities between 2.8 GHz/Pa at 0.9 Pa and 1 Hz/Pa close to atmospheric pressure. This experiment allowed us to determine the optimal operating conditions of the sensor and the integration conditions inside a vacuum chamber in addition to obtaining a pressure-dependent signal.
Keywords
compact, Pirani, SAW, sensing, vacuum, wireless
Suggested Citation
Toto S, Jouda M, Korvink JG, Sundarayyan S, Voigt A, Davoodi H, Brandner JJ. Characterization of a Wireless Vacuum Sensor Prototype Based on the SAW-Pirani Principle. (2021). LAPSE:2021.0691
Author Affiliations
Toto S: Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany [ORCID]
Jouda M: Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
Korvink JG: Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany [ORCID]
Sundarayyan S: Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
Voigt A: Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
Davoodi H: Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
Brandner JJ: Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany [ORCID]
Journal Name
Processes
Volume
8
Issue
12
Article Number
E1685
Year
2020
Publication Date
2020-12-21
Published Version
ISSN
2227-9717
Version Comments
Original Submission
Other Meta
PII: pr8121685, Publication Type: Journal Article
Record Map
Published Article

LAPSE:2021.0691
This Record
External Link

doi:10.3390/pr8121685
Publisher Version
Download
Files
[Download 1v1.pdf] (914 kB)
Jul 29, 2021
Main Article
License
CC BY 4.0
Meta
Record Statistics
Record Views
448
Version History
[v1] (Original Submission)
Jul 29, 2021
 
Verified by curator on
Jul 29, 2021
This Version Number
v1
Citations
Most Recent
This Version
URL Here
https://psecommunity.org/LAPSE:2021.0691
 
Original Submitter
Calvin Tsay
Links to Related Works
Directly Related to This Work
Publisher Version