LAPSE:2019.0628
Published Article
LAPSE:2019.0628
Computational Fluid Dynamics (CFD) Simulations and Experimental Measurements in an Inductively-Coupled Plasma Generator Operating at Atmospheric Pressure: Performance Analysis and Parametric Study
Sangeeta B. Punjabi, Dilip N. Barve, Narendra K. Joshi, Asoka K. Das, Dushyant C. Kothari, Arijit A. Ganguli, Sunil N. Sahasrabhude, Jyeshtharaj B. Joshi
July 11, 2019
In this article, electrical characteristics of a high-power inductively-coupled plasma (ICP) torch operating at 3 MHz are determined by direct measurement of radio-frequency (RF) current and voltage together with energy balance in the system. The variation of impedance with two parameters, namely the input power and the sheath gas flow rate for a 50 kW ICP is studied. The ICP torch system is operated at near atmospheric pressure with argon as plasma gas. It is observed that the plasma resistance increases with an increase in the RF-power. Further, the torch inductance decreases with an increase in the RF-power. In addition, plasma resistance and torch inductance decrease with an increase in the sheath gas flow rate. The oscillator efficiency of the ICP system ranges from 40% to 80% with the variation of the Direct current (DC) powers. ICP has also been numerically simulated using Computational Fluid Dynamics (CFD) to predict the impedance profile. A good agreement was found between the CFD predictions and the impedance experimental data published in the literature.
Keywords
Energy, impedance, inductively-coupled plasma, plasma
Suggested Citation
Punjabi SB, Barve DN, Joshi NK, Das AK, Kothari DC, Ganguli AA, Sahasrabhude SN, Joshi JB. Computational Fluid Dynamics (CFD) Simulations and Experimental Measurements in an Inductively-Coupled Plasma Generator Operating at Atmospheric Pressure: Performance Analysis and Parametric Study. (2019). LAPSE:2019.0628
Author Affiliations
Punjabi SB: Electrical Engineering Department, V.J.T.I, Matunga, Mumbai 400019, India; Department of Physics, University of Mumbai, Kalina, Santacruz (E) 400098, India [ORCID]
Barve DN: Laser and Plasma Technology Division, BARC, Mumbai 400085, India
Joshi NK: Department of Nuclear Science and Technology, Mody University of Science and Technology, Lakshamangarh (Sikar) 332311, Rajasthan, India
Das AK: Laser and Plasma Technology Division, BARC, Mumbai 400085, India
Kothari DC: Department of Physics, University of Mumbai, Kalina, Santacruz (E) 400098, India
Ganguli AA: Department of Chemical Engineering, Institute of Chemical Technology, Matunga, Mumbai 400019, India; Department of Chemical Engineering, School of Engineering and Applied Sciences, Ahmedabad University, Ahmedabad 380009, India
Sahasrabhude SN: Laser and Plasma Technology Division, BARC, Mumbai 400085, India
Joshi JB: Department of Chemical Engineering, Institute of Chemical Technology, Matunga, Mumbai 400019, India; Homi Bhabha National Institute, Anushaktinagar, Mumbai 400094, India
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Journal Name
Processes
Volume
7
Issue
3
Article Number
E133
Year
2019
Publication Date
2019-03-04
Published Version
ISSN
2227-9717
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Original Submission
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PII: pr7030133, Publication Type: Journal Article
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LAPSE:2019.0628
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doi:10.3390/pr7030133
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Jul 11, 2019
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Calvin Tsay
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